Lithographic patterning of benzoylacetone modified SnO 2 and SnO 2 :Sb thin films

Author: Kololuoma T.   Karkkainen A.H.O.   Tolonen A.   Rantala J.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 184-189

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Abstract