The process window for diamond deposition from the vapor phase with sulfur in the C-H-O feed gas mixtures

Author: Bhimarasetti G.   Sunkara M.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.440, Iss.1, 2003-09, pp. : 78-86

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Abstract