Effects of argon and oxygen addition to the CH 4 -H 2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition

Author： Kim Y.-K. Lee J.-Y. Han Y.-S.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 39-46

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