Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature

Author: Caliendo C.   Imperatori P.   Cianci E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.441, Iss.1, 2003-09, pp. : 32-37

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Abstract