Electrical properties of AlN thin films deposited at low temperature on Si(100)

Author： Aardahl C.L.   Yun H.K.   Ono Y.   Tweet D.J.   Hsu S.-T.   Rogers J.W.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.346, Iss.1, 1999-06, pp. : 174-180

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Structural, morphological and acoustic properties of AlN thick films sputtered on Si(001) and Si(111) substrates at low temperature

By Caliendo C.   Imperatori P.   Cianci E.  

Thin Solid Films, Vol. 441, Iss. 1, 2003-09 ,pp. : 32-37

Elsevier

Access to resources Recommend Favorite

Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering

By Xu X.-H.   Wu H.-S.   Zhang C.-J.   Jin Z.-H.  

Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. : 62-67

Elsevier

Access to resources Recommend Favorite

Thermal activation and temperature dependent PL and CL of Tb doped amorphous AlN and SiN thin films

By  

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol. 12, Iss. 8, 2015-08 ,pp. : 1183-1186

John Wiley & Sons Inc

Access to resources Recommend Favorite

Preparation of AlN thin films by nitridation of Al-coated Si substrate

By Huang J.   Wang L.   Shen Q.   Lin C.   Ostling M.  

Thin Solid Films, Vol. 340, Iss. 1, 1999-02 ,pp. : 137-139

Elsevier

Access to resources Recommend Favorite

Optical properties of AlN thin films correlated with sputtering conditions

By Gadenne M.   Plon J.   Gadenne P.  

Thin Solid Films, Vol. 333, Iss. 1, 1998-11 ,pp. : 251-255

Elsevier

Access to resources Recommend Favorite