Deposition of permalloy films by filtered cathodic vacuum arc

Author: Chen J.S.   Lau S.P.   Zhang Y.B.   Sun Z.   Tay B.K.   Sun C.Q.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.443, Iss.1, 2003-10, pp. : 115-119

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Abstract