Properties of amorphous ZrO x thin films deposited by filtered cathodic vacuum arc

Author: Chua D.H.C.   Milne W.I.   Zhao Z.W.   Tay B.K.   Lau S.P.   Carney T.   White R.G.  

Publisher: Elsevier

ISSN: 0022-3093

Source: Journal of Non-Crystalline Solids, Vol.332, Iss.1, 2003-12, pp. : 185-189

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Abstract