Intrinsic stress and preferred orientation in TiN coatings deposited on Al using plasma immersion ion implantation assisted deposition

Author： Mukherjee S.   Prokert F.   Richter E.   Moller W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.1, 2003-11, pp. : 48-53

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