Homogeneity of metal plasma immersion ion implantation and deposition

Author: Huber P.   Manova D.   Mandl S.   Rauschenbach B.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 133-137

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract