The characterization of capacitive micromachined ultrasonic transducers in air

Author： McIntosh J.S.   Hutchins D.A.   Billson D.R.   Robertson T.J.   Noble R.A.   Jones A.D.R.  

Publisher： Elsevier

ISSN： 0041-624X

Source： Ultrasonics, Vol.40, Iss.1, 2002-05, pp. : 477-483

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