Studies of atom beams produced by a saddle field source used for depositing diamond-like carbon films on glass

Author： Voevodin A.A.   Caperaa C.   Schneider J.M.   Stevenson P.   Matthews A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.46, Iss.3, 1995-03, pp. : 299-303

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