The effect of substrate temperature on oxygen absorption during simultaneous ion bombardment and Ag deposition on Si

Author： Mickus A.   Galdikas A.   Pranevicus L.   Tamulevicus S.   Pranevicus L.   Tamulevicus S.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.1, 1996-01, pp. : 57-60

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