The experience with JET's combined dc/RF glow discharge cleaning (GDC) system

Author: Pearce R.J.H.   Andrew P.   Bryan S.   Claesen R.   Harling J.   Jensen H.   Vadgama A.   Saibene G.   Orchard J.   How J.   McBryan H.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 665-670

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Abstract