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Effect of plasma polymerization conditions on the humidity sorptive properties of thin films obtained from hexamethyldisiloxane in glow discharge

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Study of charge transport through the sheath in dc glow discharge during plasma oxidation process

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Ti and Fe cathode sputtering by the glow discharge plasma

By Wronski Z.   Sielanko J.   Herec J.  

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Numerical simulation of the discharge in d.c. magnetron sputtering

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