Pump-down characteristics of outgassed clean stainless steel vacuum chamber and surface analysis of the chamber wall

Author： Hirohata Y. Mutoh A. Hino T. Yamashina T. Ohsako N. Kikuchi T.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 727-731

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