Study of outgassing of sputter-ion pump materials treated with three different cleaning procedures

Author： Calcatelli A.   Bergoglio M.   Mohan P.   Spagnol M.   De Simon M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 723-726

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