A new system of TiN coating on interior surface of cylindrical vacuum chamber by hollow cathode discharge method

Author： Sato M. Nishiura M. Oishi M. Minato M. Sakuma Y. Tsukahara S. Misawa S. Saito K. Ikeda Y.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 753-756

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