Spatial profile of deposited energy by the sputtered flux in a glow discharge

Author： Abril I. Garcia-Molina R. Jimenez-Rodriguez J.J. Moreno-Marin J.C. Perez-Martin A.M.C.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.7, 1997-09, pp. : 685-688

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