Measurement of small gas flow rate by the conductance modulation method

Author: Shiokawa Y.   Ichikawa M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.48, Iss.7, 1997-09, pp. : 731-734

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract