Application of quadrupole mass spectrometer for the analysis of near-surface gas composition during DC sensor-tests

Author: Bene R.   Kiss G.   Perczel I.V.   Meyer F.A.   Reti F.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.50, Iss.3, 1998-07, pp. : 331-337

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Abstract