Thermal stability of amorphous and crystalline multilayers produced by magnetron sputtering

Author: Beke D.L.   Langer G.A.   Kis-Varga M.   Dudas A.   Nemes P.   Daroczi L.   Kerekes G.   Erdelyi Z.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.50, Iss.3, 1998-07, pp. : 373-383

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Abstract