Hydrogenated amorphous silicon deposited by DC magnetron sputtering at high temperature

Author： Cherfi R.   Farhi G.   Aoucher M.   Zellama K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 192-195

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