Preparation of SrTiO 3 Films on sapphire substrate by RF magnetron sputtering

Author： Loginov V.E. Hollmann E.K. Kozyrev A.B. Prudan A.M.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.2, 1998-10, pp. : 141-143

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