Manufacture of complex optical multilayer filters using an automated deposition system

Author： Sullivan B.T.   Dobrowolski J.A.   Clarke G.   Akiyama T.   Osborne N.   Ranger M.   Howe L.   Matsumoto A.   Song Y.   Kikuchi K.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 647-654

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A multiple target system using laser ablation for multilayer deposition

By Campion R.P.   King P.J.   Dye D.R.   Ormson R.G.  

Vacuum, Vol. 47, Iss. 1, 1996-01 ,pp. : 1-3

Elsevier

Access to resources Recommend Favorite

Optical characterization of porous silicon films and multilayer filters

By Torres-Costa V.  

Applied Physics A, Vol. 79, Iss. 8, 2004-12 ,pp. : 1919-1923

Springer Publishing Company

Access to resources Recommend Favorite

Twin facing target sputtering system for the deposition of multilayer and alloy films

By Swarnalatha M.   Mohan S.  

Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. : 15-19

Elsevier

Access to resources Recommend Favorite

A Novel Opto-Mechanical System Coupled to a Spectrophotometer for Measuring Coatings on Small Size Substrates and Optical Fiber Filters

By Lima Carlos  

Composite Interfaces, Vol. 37, Iss. 5, 2009-09 ,pp. : 544-556

Taylor & Francis Ltd

Access to resources Recommend Favorite

In situ stress measurements of Co/Pd multilayer films using an optical non-contact displacement detector

By Kim Y.-S.   Shin S.-C.  

Thin Solid Films, Vol. 258, Iss. 1, 1995-03 ,pp. : 128-131

Elsevier

Access to resources Recommend Favorite