Physical and mechanical properties of reactively sputtered chromium boron nitride thin films

By Gorishnyy T.Z.   Mihut D.   Rohde S.L.   Aouadi S.M.  

Thin Solid Films, Vol. 445, Iss. 1, 2003-11 ,pp. : 96-104

Elsevier

Access to resources Recommend Favorite

Dielectric properties of RF-sputtered silicon nitride thin films with gold electrodes

By Gould R.D.   Awan S.A.  

Thin Solid Films, Vol. 433, Iss. 1, 2003-06 ,pp. : 309-314

Elsevier

Access to resources Recommend Favorite

Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films

By Dyer S.E.   Amons P.S.   Gregory O.J.   Bruins Slot A.  

Thin Solid Films, Vol. 288, Iss. 1, 1996-11 ,pp. : 279-286

Elsevier

Access to resources Recommend Favorite

Electrical properties of reactively sputtered carbon nitride films

By Wei J.   Hing P.  

Thin Solid Films, Vol. 410, Iss. 1, 2002-05 ,pp. : 21-27

Elsevier

Access to resources Recommend Favorite

Structure and properties of sequentially sputtered molybdenum-tin films

By Dahn J.R.   Turner R.L.   Mao O.   Dunlap R.A.   George A.E.   Buckett M.M.   McClure D.J.   Krause L.J.  

Thin Solid Films, Vol. 408, Iss. 1, 2002-04 ,pp. : 111-122

Elsevier

Access to resources Recommend Favorite