Proposal of new mixture target for PZT thin films by reactive sputtering

Author： Hata T. Kawagoe S. Zhang W. Sasaki K. Yoshioka Y.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 665-671

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Characterization of lead zirconate titanate thin films deposited at low temperature by reactive facing target sputtering

By Li X.-S. Tanaka T. Suzuki Y.

Thin Solid Films, Vol. 375, Iss. 1, 2000-10 ,pp. : 267-270

Elsevier

Access to resources Recommend Favorite

Ternary BCN thin films deposited by reactive sputtering

By Yue J. Cheng W. Zhang X. He D. Chen G.

Thin Solid Films, Vol. 375, Iss. 1, 2000-10 ,pp. : 247-250

Elsevier

Access to resources Recommend Favorite

Reactive unbalanced magnetron sputtering of AIN thin films

By Buc D. Hotovy I. Hascik S. Cerven I.

Vacuum, Vol. 50, Iss. 1, 1998-05 ,pp. : 121-123

Elsevier

Access to resources Recommend Favorite

Boron nitride thin films synthesized by reactive sputtering

By Hu C. Kotake S. Suzuki Y. Senoo M.

Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 748-754

Elsevier

Access to resources Recommend Favorite

Deposition of multiphase molybdate thin films by reactive sputtering

By Zou J.Y. Schrader G.L.

Thin Solid Films, Vol. 324, Iss. 1, 1998-07 ,pp. : 52-62

Elsevier

Access to resources Recommend Favorite