Stress reduction of chromium thin films deposited by cluster-type sputtering system for ultra-large-size (550x650mm) substrates

Author： Nakajima Onisawa Chahara Minemura Kamei M. Setoyama E.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 761-764

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