Tribological and chemical characterization of ion beam-deposited CN x films

Author： Quiros C. Nunez R. Prieto P. Elizalde E. Fernandez A. Schubert C. Donnet C. Sanz J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.52, Iss.1, 1999-01, pp. : 199-202

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