Relationship between the structure and the optical and electrical properties of ion beam deposited CN x films

Author： Zhao X.-A. Ong C.W. Tsang Y.C. Chan K.F. Choy C.L. Chan P.W. Kwok R.W.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 245-253

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