Reduction of water outgassing and UHV production in an unbaked vacuum chamber by neon gas discharge

Author: Akaishi K.   Ezaki K.   Kubota Y.   Motojima O.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 285-289

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Abstract