Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region

Author: Ichimura S.   Kokubun K.   Hirata M.   Tsukahara S.   Saito K.   Ikeda Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 291-294

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Abstract