Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement

Author: Spatenka P.   Vlcek J.   Blazek J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.55, Iss.2, 1999-11, pp. : 165-170

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract