Author： Musil J. Rusnak K. Jezek V. Vicek J.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.46, Iss.4, 1995-04, pp. : 341-347
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
Transfer function model of a planar magnetron for control purposes
By Stec A.
Vacuum, Vol. 63, Iss. 4, 2001-08 ,pp. :
GaN films deposited by planar magnetron sputtering
By Kikuma T. Tominaga K. Furutani K. Kusaka K. Hanabusa T. Mukai T.
Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. :
Linear relaxation to planar travelling waves in inertial confinement fusion
Nonlinearity, Vol. 26, Iss. 7, 2013-07 ,pp. :