Role of the gas temperature and power to gas flow ratio on powder and voids formation in films grown by PECVD technique

Author： Martins R.   Silva V.   Ferreira I.   Domingues A.   Fortunato E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.56, Iss.1, 2000-01, pp. : 25-30

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