Features of sputtering of nitrides with various component mass ratios

Author： Promokhov A.A.   Mosunov A.S.   Elovikov S.S.   Yurasova V.E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.56, Iss.4, 2000-03, pp. : 247-252

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