Rf magnetron sputtering of polytetrafluoroethylene under various conditions

Author: Biederman H.   Zeuner M.   Zalman J.   Blkova P.   Slavnska D.   Stelmasuk V.   Boldyreva A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.392, Iss.2, 2001-07, pp. : 208-213

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