Silicon oxide films from the Plasmodul ( R)

Author: Walker M.   Baumgartner K.-M.   Feichtinger J.   Kaiser M.   Schulz A.   Rauchle E.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.57, Iss.4, 2000-06, pp. : 387-397

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Abstract