Leakage currents and conduction mechanisms of Ta 2 O 5 layers on Si obtained by RF sputtering

Author: Paskaleva A.   Atanassova E.   Dimitrova T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.58, Iss.2, 2000-08, pp. : 470-477

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Abstract