Effects of the annealing atmosphere on the electrical properties of low-power pulsed-laser annealed Zn-implanted InP

Author: Pizzuto C.   Vitali G.   Zollo G.   Kalitzova M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.58, Iss.2, 2000-08, pp. : 516-522

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Abstract