Interfacial adhesion and its degradation in selected metal/oxide and dielectric/oxide interfaces in multi-layer devices

Author： Gupta V.   Hernandez R.   Wu J.   Charconnet P.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.1, 2000-10, pp. : 292-300

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