Author： Heister U. Krempel-Hesse J. Szczyrbowski J. Teschner G. Bruch J. Brauer G.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 424-430
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
TwinMag TM II: attempts to improve an excellent sputter tool
By Heister U. Krempel-Hesse J. Szczyrbowski J. Teschner G. Bruch J. Brauer G.
Thin Solid Films, Vol. 351, Iss. 1, 1999-08 ,pp. :
Access to resources
Recommend
Mid frequency sputtering with TwinMag ( R)-a survey of recent results
By Brauer G. Ruske M. Szczyrbowski J. Teschner G. Zmelty A.
Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. :
Twin facing target sputtering system for the deposition of multilayer and alloy films
Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. :
Wear of advanced ceramics for tool materials
By D'Errico G.E. Bugliosi S. Calzavarini R. Cuppini D.
Wear, Vol. 225, Iss. 1, 1999-04 ,pp. :