Mid frequency sputtering with TwinMag ( R)-a survey of recent results

Author: Brauer G.   Ruske M.   Szczyrbowski J.   Teschner G.   Zmelty A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.4, 1998-12, pp. : 655-659

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Abstract