Generation and evolution of residual stresses in physical vapour-deposited thin films

Author: Pauleau Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.61, Iss.2, 2001-05, pp. : 175-181

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract