Influence of residual stresses on the mechanical properties of TiC x N 1-x (x=0, 0.15, 0.45) thin films deposited by arc evaporation

Author： Karlsson L. Hultman L. Sundgren J.-E.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 167-177

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