Refractive index of sputtered silicon oxynitride layers for antireflection coating

Author: Serenyi M.   Racz M.   Lohner T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.61, Iss.2, 2001-05, pp. : 245-249

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract