Combined experimental and calculation study of conductance of Roots pump channels

Author: Burmistrov A.   Belyaev L.   Ossipov P.   Fomina M.   Khannanov R.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.62, Iss.4, 2001-06, pp. : 331-335

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Abstract