Deposition of permalloy films by filtered cathodic vacuum arc

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Thin Solid Films, Vol. 443, Iss. 1, 2003-10 ,pp. : 115-119

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Deposition of (Ti, Al)N films by filtered cathodic vacuum arc

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Properties of amorphous ZrO x thin films deposited by filtered cathodic vacuum arc

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Spectroscopic ellipsometry studies of tetrahedral amorphous carbon prepared by filtered cathodic vacuum arc technique

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Structural and mechanical properties of Ti-containing diamond-like carbon films deposited by filtered cathodic vacuum arc

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