Hundred MeV heavy ion irradiation effect on boron diffusion in Si

Author: Skuratov V.A.   Dinu N.   Antonova I.V.   Obodnikov V.I.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 571-575

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