Formation of ultra-thin PtSi film by vacuum annealing

Author: Shuang L.   Zhiyong Z.   Yonggong N.   Ai C.   Huaiwu Z.   Jiade Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.65, Iss.2, 2002-04, pp. : 133-136

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Abstract