Sputtering of metals by heavy ions in the inelastic energy loss range

Author： Cheblukov Y.N.   Didyk A.Y.   Halil A.   Semina V.K.   Stepanov A.E.   Suvorov A.L.   Vasiliev N.A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.2, 2002-07, pp. : 133-136

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